Semiconductor metrology


Research leader

Dirch Hjorth Petersen

Senior Researcher, Ph.D.

Project title

Microelectrode-based measurement system will create new insight into electron transport in electronic components

What is your project about?

This research project aims at developing advanced metrology methods for the characterization of semiconductor materials. The project will focus on development of metrology aimed at (1) materials used to convert waste heat to electricity and (2) materials for future microprocessors. The metrology methods will be based on microelectrodes, which are already today used industrially for the electrical characterization of advanced materials. The goal is to make fast and accurate measurements of the key indicators for three-dimensional thermoelectric materials (i.e. the ’figure of merit’) and one-dimensional electronic materials (i.e. charge carrier concentration and mobility in nanostructures).

How did you become interested in your particular field of research?

Since my time as engineering student, I have worked with development of microelectrodes for the electrical characterization of ultra-thin metals and semiconductors. The metrology methods I've been part of developing are now so precise that they open up the opportunity to measure new effects that are highly relevant to understanding advanced semiconductor materials.

What are the scientific challenges and perspectives in your project?

In the project I will develop a measuring system for temperature controlled electrical characterization of materials. Hardware, experimental methods, theory and data processing routines need to be developed. With this system, I will be able to characterize semiconductor materials faster, more precisely and with higher spatial resolution than possible with today's state-of-the-art metrology.

What is your estimate of the impact, which your project may have to society in the long term?

A significant improvement in metrology will result in better semiconductor materials and thus better (cheaper and more energy efficient) semiconductor based products such as microprocessors and thermoelectric generators.

Which impact do you expect the Sapere Aude programme will have on your career as a researcher?

Sapere Aude will allow me to work with a complicated long-term project, where I will explore new metrology methods. I will be given the opportunity to build a research group, build an advanced measuring system and develop myself as a research leader.

City of current residence

High school